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Electrical reliability challenges of advanced low-k dielectrics

dc.contributor.authorWu, Chen
dc.contributor.authorLi, Yunlong
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-23T01:06:28Z
dc.date.available2021-10-23T01:06:28Z
dc.date.issued2015
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26187
dc.sourceIIOimport
dc.titleElectrical reliability challenges of advanced low-k dielectrics
dc.typeJournal article
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.beginpageN3065
dc.source.endpageN3070
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume4
dc.identifier.urlhttp://jss.ecsdl.org/content/4/1/N3065.abstract
imec.availabilityPublished - imec


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