dc.contributor.author | Zhang, Liping | |
dc.contributor.author | de Marneffe, Jean-Francois | |
dc.contributor.author | Heylen, Nancy | |
dc.contributor.author | Murdoch, Gayle | |
dc.contributor.author | Tokei, Zsolt | |
dc.contributor.author | Boemmels, Juergen | |
dc.contributor.author | De Gendt, Stefan | |
dc.contributor.author | Baklanov, Mikhaïl | |
dc.date.accessioned | 2021-10-23T01:33:30Z | |
dc.date.available | 2021-10-23T01:33:30Z | |
dc.date.issued | 2015 | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26239 | |
dc.source | IIOimport | |
dc.title | Damage free integration of ultralow-k dielectrics by template replacement approach | |
dc.type | Journal article | |
dc.contributor.imecauthor | Zhang, Liping | |
dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
dc.contributor.imecauthor | Heylen, Nancy | |
dc.contributor.imecauthor | Murdoch, Gayle | |
dc.contributor.imecauthor | Tokei, Zsolt | |
dc.contributor.imecauthor | Boemmels, Juergen | |
dc.contributor.imecauthor | De Gendt, Stefan | |
dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 92901 | |
dc.source.journal | Applied Physics Letters | |
dc.source.issue | 2 | |
dc.source.volume | 107 | |
dc.identifier.url | http://scitation.aip.org/content/aip/journal/apl/107/9/10.1063/1.4930072 | |
imec.availability | Published - imec | |