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Low dielectric constant materials for nanoelectronics

dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorVanstreels, Kris
dc.contributor.authorWu, Chen
dc.contributor.authorLi, Yunlong
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-23T10:05:23Z
dc.date.available2021-10-23T10:05:23Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26308
dc.sourceIIOimport
dc.titleLow dielectric constant materials for nanoelectronics
dc.typeBook chapter
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewno
dc.source.beginpage163
dc.source.bookThin Films on Silicon: Electronic and Photonic Applications
dc.source.endpage271
imec.availabilityPublished - imec
imec.internalnotesSeries: Materials and Energy. Vol. 8


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