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Optical proximity correction: a cross road of data flows

dc.contributor.authorDe Bisschop, Peter
dc.date.accessioned2021-10-23T10:24:38Z
dc.date.available2021-10-23T10:24:38Z
dc.date.issued2016
dc.identifier.issn0021-4922
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26490
dc.sourceIIOimport
dc.titleOptical proximity correction: a cross road of data flows
dc.typeJournal article
dc.contributor.imecauthorDe Bisschop, Peter
dc.source.peerreviewyes
dc.source.beginpage06GA01
dc.source.journalJapanese Journal of Applied Physics
dc.source.issue6
dc.source.volume55
dc.identifier.urlhttp://iopscience.iop.org/article/10.7567/JJAP.55.06GA01/meta
imec.availabilityPublished - imec


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