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Effect of elastic constants on the stresses in stripes and substrates: a 2D FE calculation

dc.contributor.authorJain, Suresh
dc.contributor.authorPinardi, Kuntjoro
dc.contributor.authorMaes, Herman
dc.contributor.authorVan Overstraeten, Roger
dc.contributor.authorWillander, M.
dc.date.accessioned2021-09-30T12:15:51Z
dc.date.available2021-09-30T12:15:51Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2649
dc.sourceIIOimport
dc.titleEffect of elastic constants on the stresses in stripes and substrates: a 2D FE calculation
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage864
dc.source.endpage870
dc.source.journalSemiconductor Science and Technology
dc.source.issue8
dc.source.volume13
imec.availabilityPublished - open access


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