Ion beam synthesis of TiSi2 in (100)Si and (111)Si

dc.contributor.author	Jin, S.
dc.contributor.author	Chen, L. J.
dc.date.accessioned	2021-09-30T12:17:21Z
dc.date.available	2021-09-30T12:17:21Z
dc.date.issued	1998
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/2655
dc.source	IIOimport
dc.title	Ion beam synthesis of TiSi2 in (100)Si and (111)Si
dc.type	Journal article
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.source.beginpage	360
dc.source.endpage	364
dc.source.journal	Materials Chemistry and Physics
dc.source.issue	1_3
dc.source.volume	54
imec.availability	Published - open access