Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition
dc.contributor.author | Ficek, Mateusz | |
dc.contributor.author | Sankaran, Kamatchi | |
dc.contributor.author | Ryl, Jacek | |
dc.contributor.author | Bogdanowicz, Robert | |
dc.contributor.author | Lin, I-Nan | |
dc.contributor.author | Haenen, Ken | |
dc.contributor.author | Darowicki, Kazimierz | |
dc.date.accessioned | 2021-10-23T10:49:29Z | |
dc.date.available | 2021-10-23T10:49:29Z | |
dc.date.issued | 2016 | |
dc.identifier.issn | 0003-6951 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26619 | |
dc.source | IIOimport | |
dc.title | Ellipsometric investigation of nitrogen doped diamond thin films grown in microwave CH4/H2/N2 plasma enhanced chemical vapor deposition | |
dc.type | Journal article | |
dc.contributor.imecauthor | Haenen, Ken | |
dc.contributor.orcidimec | Haenen, Ken::0000-0001-6711-7367 | |
dc.date.embargo | 9999-12-31 | |
dc.identifier.doi | 10.1063/1.4953779 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 241906 | |
dc.source.journal | Applied Physics Letters | |
dc.source.volume | 108 | |
dc.identifier.url | http://scitation.aip.org/content/aip/journal/apl/108/24/10.1063/1.4953779 | |
imec.availability | Published - open access |