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Composition analysis of III-V materials grown in nanostructures: the self-focusing SIMS approach

dc.contributor.authorFranquet, Alexis
dc.contributor.authorDouhard, Bastien
dc.contributor.authorConard, Thierry
dc.contributor.authorMelkonyan, Davit
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T10:53:28Z
dc.date.available2021-10-23T10:53:28Z
dc.date.issued2016
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26634
dc.sourceIIOimport
dc.titleComposition analysis of III-V materials grown in nanostructures: the self-focusing SIMS approach
dc.typeJournal article
dc.contributor.imecauthorFranquet, Alexis
dc.contributor.imecauthorDouhard, Bastien
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecFranquet, Alexis::0000-0002-7371-8852
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.source.peerreviewyes
dc.source.beginpage03H127
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue3
dc.source.volume34
dc.identifier.urlhttp://scitation.aip.org/content/avs/journal/jvstb/34/3/10.1116/1.4943950
imec.availabilityPublished - imec


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