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Integration of DSA Via Patterning in sub-7 nm Circuits

dc.contributor.authorKarageorgos, Ioannis
dc.contributor.authorDehaene, Wim
dc.date.accessioned2021-10-23T11:38:39Z
dc.date.available2021-10-23T11:38:39Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26802
dc.sourceIIOimport
dc.titleIntegration of DSA Via Patterning in sub-7 nm Circuits
dc.typeBook chapter
dc.contributor.imecauthorDehaene, Wim
dc.source.peerreviewno
dc.source.bookESAT-MICAS Annual Report 2015
imec.availabilityPublished - imec


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