Integration of DSA Via Patterning in sub-7 nm Circuits
dc.contributor.author | Karageorgos, Ioannis | |
dc.contributor.author | Dehaene, Wim | |
dc.date.accessioned | 2021-10-23T11:38:39Z | |
dc.date.available | 2021-10-23T11:38:39Z | |
dc.date.issued | 2016 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26802 | |
dc.source | IIOimport | |
dc.title | Integration of DSA Via Patterning in sub-7 nm Circuits | |
dc.type | Book chapter | |
dc.contributor.imecauthor | Dehaene, Wim | |
dc.source.peerreview | no | |
dc.source.book | ESAT-MICAS Annual Report 2015 | |
imec.availability | Published - imec |
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