dc.contributor.author | Karageorgos, Ioannis | |
dc.contributor.author | Ryckaert, Julien | |
dc.contributor.author | Gronheid, Roel | |
dc.contributor.author | Tung, Maryann C. | |
dc.contributor.author | Wong, H.-S. Philip | |
dc.contributor.author | Karageorgos, Evangelos | |
dc.contributor.author | Croes, Kris | |
dc.contributor.author | Bekaert, Joost | |
dc.contributor.author | Vandenberghe, Geert | |
dc.contributor.author | Stucchi, Michele | |
dc.contributor.author | Dehaene, Wim | |
dc.date.accessioned | 2021-10-23T11:40:14Z | |
dc.date.available | 2021-10-23T11:40:14Z | |
dc.date.issued | 2016-11 | |
dc.identifier.issn | 1932-5150 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26807 | |
dc.source | IIOimport | |
dc.title | Design method and algorithms for directed self-assembly aware via layout decomposition in sub-7 nm circuits | |
dc.type | Journal article | |
dc.contributor.imecauthor | Ryckaert, Julien | |
dc.contributor.imecauthor | Gronheid, Roel | |
dc.contributor.imecauthor | Bekaert, Joost | |
dc.contributor.imecauthor | Vandenberghe, Geert | |
dc.contributor.imecauthor | Stucchi, Michele | |
dc.contributor.imecauthor | Dehaene, Wim | |
dc.contributor.orcidimec | Bekaert, Joost::0000-0003-3075-3479 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 43506 | |
dc.source.journal | Journal of Micro/Nanolithography MEMS and MOEMS | |
dc.source.issue | 4 | |
dc.source.volume | 15 | |
dc.identifier.url | http://dx.doi.org/10.1117/1.JMM.15.4.043506 | |
imec.availability | Published - imec | |