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Highly conformal fabrication of nanopatterns on non-planar surfaces

dc.contributor.authorMassiot, Ines
dc.contributor.authorTrompoukis, Christos
dc.contributor.authorLodewijks, Kristof
dc.contributor.authorDepauw, Valerie
dc.contributor.authorDmitriev, Alexandre
dc.date.accessioned2021-10-23T12:37:43Z
dc.date.available2021-10-23T12:37:43Z
dc.date.issued2016
dc.identifier.issn2040-3364
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26977
dc.sourceIIOimport
dc.titleHighly conformal fabrication of nanopatterns on non-planar surfaces
dc.typeJournal article
dc.contributor.imecauthorLodewijks, Kristof
dc.contributor.imecauthorDepauw, Valerie
dc.contributor.orcidimecLodewijks, Kristof::0000-0001-9105-997X
dc.contributor.orcidimecDepauw, Valerie::0000-0003-2045-9698
dc.source.peerreviewyes
dc.source.beginpage11461
dc.source.endpage11466
dc.source.journalNanoscale
dc.source.volume8
dc.identifier.urlhttp://pubs.rsc.org/en/content/articlelanding/2016/nr/c6nr00749j#!divAbstract
imec.availabilityPublished - imec


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