dc.contributor.author | Meddeb, Hosny | |
dc.contributor.author | Bearda, Twan | |
dc.contributor.author | Abdulraheem, Yaser | |
dc.contributor.author | Dimassi, Wissem | |
dc.contributor.author | Ezzaouia, Hatem | |
dc.contributor.author | Gordon, Ivan | |
dc.contributor.author | Szlufcik, Jozef | |
dc.contributor.author | Poortmans, Jef | |
dc.date.accessioned | 2021-10-23T12:39:33Z | |
dc.date.available | 2021-10-23T12:39:33Z | |
dc.date.issued | 2016 | |
dc.identifier.issn | 0749-6036 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/26982 | |
dc.source | IIOimport | |
dc.title | In-situ optical emission spectroscopy diagnostic of plasma ignition impact on crystalline silicon passivation by a-Si:H films | |
dc.type | Journal article | |
dc.contributor.imecauthor | Gordon, Ivan | |
dc.contributor.imecauthor | Szlufcik, Jozef | |
dc.contributor.imecauthor | Poortmans, Jef | |
dc.contributor.orcidimec | Gordon, Ivan::0000-0002-0713-8403 | |
dc.contributor.orcidimec | Poortmans, Jef::0000-0003-2077-2545 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 253 | |
dc.source.endpage | 258 | |
dc.source.journal | Superlattices and Microsctructures | |
dc.source.volume | 96 | |
dc.identifier.url | http://www.sciencedirect.com/science/article/pii/S0749603616302518 | |
imec.availability | Published - imec | |