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In-situ optical emission spectroscopy diagnostic of plasma ignition impact on crystalline silicon passivation by a-Si:H films

dc.contributor.authorMeddeb, Hosny
dc.contributor.authorBearda, Twan
dc.contributor.authorAbdulraheem, Yaser
dc.contributor.authorDimassi, Wissem
dc.contributor.authorEzzaouia, Hatem
dc.contributor.authorGordon, Ivan
dc.contributor.authorSzlufcik, Jozef
dc.contributor.authorPoortmans, Jef
dc.date.accessioned2021-10-23T12:39:33Z
dc.date.available2021-10-23T12:39:33Z
dc.date.issued2016
dc.identifier.issn0749-6036
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/26982
dc.sourceIIOimport
dc.titleIn-situ optical emission spectroscopy diagnostic of plasma ignition impact on crystalline silicon passivation by a-Si:H films
dc.typeJournal article
dc.contributor.imecauthorGordon, Ivan
dc.contributor.imecauthorSzlufcik, Jozef
dc.contributor.imecauthorPoortmans, Jef
dc.contributor.orcidimecGordon, Ivan::0000-0002-0713-8403
dc.contributor.orcidimecPoortmans, Jef::0000-0003-2077-2545
dc.source.peerreviewyes
dc.source.beginpage253
dc.source.endpage258
dc.source.journalSuperlattices and Microsctructures
dc.source.volume96
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0749603616302518
imec.availabilityPublished - imec


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