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Extraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation

dc.contributor.authorOkudur, Oguzhan Orkut
dc.contributor.authorVanstreels, Kris
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorHangen, Ude
dc.date.accessioned2021-10-23T13:20:48Z
dc.date.available2021-10-23T13:20:48Z
dc.date.issued2016
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27090
dc.sourceIIOimport
dc.titleExtraction of elastic modulus of porous ultra-thin low-k films by two-dimensional finite-element simulations of nanoindentation
dc.typeJournal article
dc.contributor.imecauthorOkudur, Oguzhan Orkut
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecOkudur, Oguzhan Orkut::0000-0002-4790-7772
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage25302
dc.source.journalJournal of Applied Physics
dc.source.issue2
dc.source.volume119
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/jap/119/2/10.1063/1.4939284
imec.availabilityPublished - imec


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