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Supercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films

dc.contributor.authorRasadujjaman, Md
dc.contributor.authorNakamura, Y
dc.contributor.authorWatanabe, M
dc.contributor.authorKondoh, E
dc.contributor.authorBaklanov, Mikhaïl
dc.date.accessioned2021-10-23T14:03:53Z
dc.date.available2021-10-23T14:03:53Z
dc.date.issued2016
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27194
dc.sourceIIOimport
dc.titleSupercritical carbon dioxide etching of transition metal (Cu, Ni, Co, Fe) thin films
dc.typeJournal article
dc.source.peerreviewyes
dc.source.beginpage5
dc.source.endpage10
dc.source.journalMicroelectronic Engineering
dc.source.volume153
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931715301192
imec.availabilityPublished - imec


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