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Outwitting the series resistance in scanning spreading resistance microscopy

dc.contributor.authorSchulze, Andreas
dc.contributor.authorCao, Ruping
dc.contributor.authorEyben, Pierre
dc.contributor.authorHantschel, Thomas
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-23T14:44:00Z
dc.date.available2021-10-23T14:44:00Z
dc.date.issued2016
dc.identifier.issn0304-3991
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27286
dc.sourceIIOimport
dc.titleOutwitting the series resistance in scanning spreading resistance microscopy
dc.typeJournal article
dc.contributor.imecauthorEyben, Pierre
dc.contributor.imecauthorHantschel, Thomas
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecHantschel, Thomas::0000-0001-9476-4084
dc.source.peerreviewyes
dc.source.beginpage59
dc.source.endpage65
dc.source.journalUltramicroscopy
dc.source.volume161
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0304399115300711
imec.availabilityPublished - imec


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