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dc.contributor.authorShang, Xiaobing
dc.contributor.authorJoshi, Pankaj
dc.contributor.authorTan, Jin-Yi
dc.contributor.authorDe Smet, Jelle
dc.contributor.authorCuypers, Dieter
dc.contributor.authorBaghdasaryan, Tigran
dc.contributor.authorVervaeke, Michael
dc.contributor.authorThienpont, Hugo
dc.contributor.authorDe Smet, Herbert
dc.date.accessioned2021-10-23T14:47:03Z
dc.date.available2021-10-23T14:47:03Z
dc.date.issued2016
dc.identifier.issn0022-3727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27293
dc.sourceIIOimport
dc.titleSwitchable circular beam deflectors
dc.typeJournal article
dc.contributor.imecauthorCuypers, Dieter
dc.contributor.imecauthorDe Smet, Herbert
dc.contributor.orcidimecCuypers, Dieter::0000-0003-0550-6273
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage165101
dc.source.journalJournal of Physics D: Applied Physics
dc.source.volume49
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/0022-3727/49/16/165101/pdf
imec.availabilityPublished - open access


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