dc.contributor.author | Simoen, Eddy | |
dc.contributor.author | Schaekers, Marc | |
dc.contributor.author | Liu, Jinbiao | |
dc.contributor.author | Luo, Jun | |
dc.contributor.author | Zhao, Chao | |
dc.contributor.author | Barla, Kathy | |
dc.contributor.author | Collaert, Nadine | |
dc.date.accessioned | 2021-10-23T15:00:06Z | |
dc.date.available | 2021-10-23T15:00:06Z | |
dc.date.issued | 2016 | |
dc.identifier.issn | 1862-6300 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27322 | |
dc.source | IIOimport | |
dc.title | Defect engineering for shallow n-type junctions in germanium: facts and fiction | |
dc.type | Journal article | |
dc.contributor.imecauthor | Simoen, Eddy | |
dc.contributor.imecauthor | Schaekers, Marc | |
dc.contributor.imecauthor | Barla, Kathy | |
dc.contributor.imecauthor | Collaert, Nadine | |
dc.contributor.orcidimec | Simoen, Eddy::0000-0002-5218-4046 | |
dc.contributor.orcidimec | Schaekers, Marc::0000-0002-1496-7816 | |
dc.contributor.orcidimec | Collaert, Nadine::0000-0002-8062-3165 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 2799 | |
dc.source.endpage | 2808 | |
dc.source.journal | Physica Status Solidi A | |
dc.source.issue | 11 | |
dc.source.volume | 213 | |
dc.identifier.url | http://onlinelibrary.wiley.com/doi/10.1002/pssa.201600491/abstract | |
imec.availability | Published - imec | |
imec.internalnotes | E-MRS Spring -- Symposium K | |