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Optimized material solutions for advanced DRAM peripheral transistors

dc.contributor.authorSpessot, Alessio
dc.contributor.authorRitzenthaler, Romain
dc.contributor.authorSchram, Tom
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorFazan, Pierre
dc.date.accessioned2021-10-23T15:08:10Z
dc.date.available2021-10-23T15:08:10Z
dc.date.issued2016
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27339
dc.sourceIIOimport
dc.titleOptimized material solutions for advanced DRAM peripheral transistors
dc.typeJournal article
dc.contributor.imecauthorSpessot, Alessio
dc.contributor.imecauthorRitzenthaler, Romain
dc.contributor.imecauthorSchram, Tom
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorFazan, Pierre
dc.contributor.orcidimecRitzenthaler, Romain::0000-0002-8615-3272
dc.contributor.orcidimecSchram, Tom::0000-0003-1533-7055
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.source.peerreviewyes
dc.source.beginpage245
dc.source.endpage254
dc.source.journalPhysica Status Solidi A
dc.source.issue2
dc.source.volume213
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201532791/abstract
imec.availabilityPublished - imec


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