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Processes in ultrthin buried oxide synthesis stimulated by low dose ion implantation

dc.contributor.authorLitovchenko, V. G.
dc.contributor.authorEfremov, A. A.
dc.contributor.authorRomanyuk, B. N.
dc.contributor.authorMel'nik, V. P.
dc.contributor.authorClaeys, Cor
dc.date.accessioned2021-10-01T08:29:08Z
dc.date.available2021-10-01T08:29:08Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2735
dc.sourceIIOimport
dc.titleProcesses in ultrthin buried oxide synthesis stimulated by low dose ion implantation
dc.typeJournal article
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage2964
dc.source.endpage2969
dc.source.journalJ. Electrochem. Soc.
dc.source.issue8
dc.source.volume145
imec.availabilityPublished - open access


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