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Surface-confined activation of ultra low-k dielectrics in CO2 plasma

dc.contributor.authorSun, Yiting
dc.contributor.authorKrishtab, Mikhail
dc.contributor.authorMankelevich, Yuri
dc.contributor.authorZhang, Liping
dc.contributor.authorDe Feyter, Steven
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorArmini, Silvia
dc.date.accessioned2021-10-23T15:21:31Z
dc.date.available2021-10-23T15:21:31Z
dc.date.issued2016
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27367
dc.sourceIIOimport
dc.titleSurface-confined activation of ultra low-k dielectrics in CO2 plasma
dc.typeJournal article
dc.contributor.imecauthorSun, Yiting
dc.contributor.imecauthorKrishtab, Mikhail
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage262902
dc.source.journalApplied Physics Letters
dc.source.issue26
dc.source.volume108
dc.identifier.urlhttp://scitation.aip.org/content/aip/journal/apl/108/26/10.1063/1.4955021
imec.availabilityPublished - open access


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