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Influence of grown-in defects on the optical and electrical properties of Si/Si 1-xGex/Si heterostructures

dc.contributor.authorLoo, Roger
dc.contributor.authorCaymax, Matty
dc.contributor.authorSimoen, Eddy
dc.contributor.authorHoward, Dave
dc.contributor.authorGoryll, M.
dc.contributor.authorKlaes, D.
dc.contributor.authorVescan, L.
dc.contributor.authorGravesteijn, Dirk
dc.contributor.authorPetersson, H.
dc.contributor.authorZhang, X.
dc.date.accessioned2021-10-01T08:29:14Z
dc.date.available2021-10-01T08:29:14Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2740
dc.sourceIIOimport
dc.titleInfluence of grown-in defects on the optical and electrical properties of Si/Si 1-xGex/Si heterostructures
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.date.embargo9999-12-31
dc.source.peerreviewno
dc.source.beginpage227
dc.source.endpage231
dc.source.journalThin Solid Films
dc.source.volume336
imec.availabilityPublished - open access
imec.internalnotesE-MRS 1998 Spring Meeting; June 1998; Strasbourg, France


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