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Surface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams

dc.contributor.authorUedono, Akira
dc.contributor.authorArmini, Silvia
dc.contributor.authorZhang, Yu
dc.contributor.authorKakizaki, Takeaki
dc.contributor.authorKrause-Rehberg, Reinhard
dc.contributor.authorAnwand, Wolfgang
dc.contributor.authorWagner, Andreas
dc.date.accessioned2021-10-23T15:43:24Z
dc.date.available2021-10-23T15:43:24Z
dc.date.issued2016
dc.identifier.issn0169-4332
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27413
dc.sourceIIOimport
dc.titleSurface sealing using self-assembled monolayers and its effect on metal diffusion in porous low-k dielectrics studied using monoenergetic positron beams
dc.typeJournal article
dc.contributor.imecauthorArmini, Silvia
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.source.peerreviewyes
dc.source.beginpage272
dc.source.endpage276
dc.source.journalApplied Surface Science
dc.source.volume368
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0169433216301283
imec.availabilityPublished - imec


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