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Ultrasonic spray deposition of metal oxide films on high aspect ratio microstructures for 3D all-solid-state Li-ion batteries

dc.contributor.authorVan den Ham, Jonathan
dc.contributor.authorGielis, Sven
dc.contributor.authorVan Bael, Marlies
dc.contributor.authorHardy, An
dc.date.accessioned2021-10-23T15:58:14Z
dc.date.available2021-10-23T15:58:14Z
dc.date.issued2016
dc.identifier.issn2380-8195
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27444
dc.sourceIIOimport
dc.titleUltrasonic spray deposition of metal oxide films on high aspect ratio microstructures for 3D all-solid-state Li-ion batteries
dc.typeJournal article
dc.contributor.imecauthorVan Bael, Marlies
dc.contributor.imecauthorHardy, An
dc.contributor.orcidimecVan Bael, Marlies::0000-0002-5516-7962
dc.date.embargo9999-12-31
dc.identifier.doi10.1021/acsenergy/lett.6b00449
dc.source.peerreviewyes
dc.source.beginpage1184
dc.source.endpage1188
dc.source.journalACS Energy Letters
dc.source.volume1
dc.identifier.urlhttp://pubs.acs.org/doi/full/10.1021/acsenergylett.6b00449
imec.availabilityPublished - open access


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