Show simple item record

Electrical reliability challenges of advanced low-k dielectrics

dc.contributor.authorWu, Chen
dc.contributor.authorLi, Yunlong
dc.contributor.authorBaklanov, Mikhaïl
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-23T17:17:20Z
dc.date.available2021-10-23T17:17:20Z
dc.date.issued2016
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27600
dc.sourceIIOimport
dc.titleElectrical reliability challenges of advanced low-k dielectrics
dc.typeBook chapter
dc.contributor.imecauthorWu, Chen
dc.contributor.imecauthorLi, Yunlong
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecWu, Chen::0000-0002-4636-8842
dc.contributor.orcidimecLi, Yunlong::0000-0003-4791-4013
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewno
dc.source.beginpage163
dc.source.bookThin Films on Silicon: Electronic and Photonic Applications
dc.source.endpage272
dc.identifier.urlhttp://www.worldscientific.com/doi/abs/10.1142/9789814740487_0005
imec.availabilityPublished - imec
imec.internalnotesMaterials and Energy: Vol. 8


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record