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A numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes

dc.contributor.authorZahedmanesh, Houman
dc.contributor.authorVanstreels, Kris
dc.contributor.authorGonzalez, Mario
dc.date.accessioned2021-10-23T17:43:27Z
dc.date.available2021-10-23T17:43:27Z
dc.date.issued2016
dc.identifier.issn0167-9317
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27649
dc.sourceIIOimport
dc.titleA numerical study on nano-indentation induced fracture of low dielectric constant brittle thin films using cube corner probes
dc.typeJournal article
dc.contributor.imecauthorZahedmanesh, Houman
dc.contributor.imecauthorVanstreels, Kris
dc.contributor.imecauthorGonzalez, Mario
dc.contributor.orcidimecVanstreels, Kris::0000-0002-4420-0966
dc.source.peerreviewyes
dc.source.beginpage108
dc.source.endpage115
dc.source.journalMicroelectronic Engineering
dc.source.volume156
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0167931716300065
imec.availabilityPublished - imec


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