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Direction fabrication of complex 3D hierarchical nanostructures by reactive ion etching of hollow sphere colloidal crystals

dc.contributor.authorZhong, Kuo
dc.contributor.authorLi, Jiaqi
dc.contributor.authorVancleuvenbergen, Stijn
dc.contributor.authorClays, Koen
dc.date.accessioned2021-10-23T17:55:22Z
dc.date.available2021-10-23T17:55:22Z
dc.date.issued2016
dc.identifier.issn2040-3364
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27671
dc.sourceIIOimport
dc.titleDirection fabrication of complex 3D hierarchical nanostructures by reactive ion etching of hollow sphere colloidal crystals
dc.typeJournal article
dc.source.peerreviewyes
dc.source.beginpage15845
dc.source.endpage15849
dc.source.journalNanoscale
dc.source.issue35
dc.source.volume8
dc.identifier.urlhttp://pubs.rsc.org/en/content/articlelanding/2016/nr/c6nr05365c#!divAbstract
imec.availabilityPublished - imec


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