Control of semiconductor interfaces and SiGe technology/devices (Preface)
dc.contributor.editor | Washio, Katsuyoshi | |
dc.contributor.editor | Miyazaki,, Seiichi | |
dc.contributor.editor | Takagi, Shigeaki | |
dc.contributor.editor | Ito, Toshimichi | |
dc.contributor.editor | Loo, Roger | |
dc.date.accessioned | 2021-10-24T02:50:38Z | |
dc.date.available | 2021-10-24T02:50:38Z | |
dc.date.issued | 2017 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/27683 | |
dc.source | IIOimport | |
dc.title | Control of semiconductor interfaces and SiGe technology/devices (Preface) | |
dc.type | Journal article | |
dc.source.peerreview | no | |
dc.source.beginpage | 1 | |
dc.source.endpage | 2 | |
dc.source.journal | Materials Science in Semiconductor Processing | |
dc.source.volume | 70 | |
dc.identifier.url | http://www.sciencedirect.com/science/journal/13698001/70?sdc=1 | |
imec.availability | Published - imec | |
imec.internalnotes | Preface |
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