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Strain characterization of CoSi2/n-Si0.9/Ge0.1/p-Si heterostructures

dc.contributor.authorNur, O.
dc.contributor.authorWillander, M.
dc.contributor.authorRadamson, H. H.
dc.contributor.authorSardela, M. R.
dc.contributor.authorHansson, G. V.
dc.contributor.authorPetersson, C. S.
dc.contributor.authorMaex, Karen
dc.date.accessioned2021-09-29T12:44:38Z
dc.date.available2021-09-29T12:44:38Z
dc.date.issued1994
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/276
dc.sourceIIOimport
dc.titleStrain characterization of CoSi2/n-Si0.9/Ge0.1/p-Si heterostructures
dc.typeJournal article
dc.contributor.imecauthorMaex, Karen
dc.source.peerreviewno
dc.source.beginpage440
dc.source.endpage2
dc.source.journalApplied Physics Letters
dc.source.issue4
dc.source.volume64
imec.availabilityPublished - imec


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