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Study of the enhanced electromigration performance of Cu(Mn) by low-frequency noise measurements and atom probe tomography

dc.contributor.authorBeyne, Sofie
dc.contributor.authorArnoldi, Laurent
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorTokei, Zsolt
dc.contributor.authorCroes, Kristof
dc.date.accessioned2021-10-24T02:59:21Z
dc.date.available2021-10-24T02:59:21Z
dc.date.issued2017
dc.identifier.issn0003-6951
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27846
dc.sourceIIOimport
dc.titleStudy of the enhanced electromigration performance of Cu(Mn) by low-frequency noise measurements and atom probe tomography
dc.typeJournal article
dc.contributor.imecauthorBeyne, Sofie
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorCroes, Kristof
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.source.peerreviewyes
dc.source.beginpage83105
dc.source.journalApplied Physics Letters
dc.source.issue8
dc.source.volume111
dc.identifier.urlhttp://aip.scitation.org/doi/full/10.1063/1.4989898
imec.availabilityPublished - imec


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