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Nanoscale three-dimensional characterization with scalpel SPM

dc.contributor.authorCelano, Umberto
dc.contributor.authorVandervorst, Wilfried
dc.date.accessioned2021-10-24T03:21:22Z
dc.date.available2021-10-24T03:21:22Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/27992
dc.sourceIIOimport
dc.titleNanoscale three-dimensional characterization with scalpel SPM
dc.typeBook chapter
dc.contributor.imecauthorCelano, Umberto
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecCelano, Umberto::0000-0002-2856-3847
dc.source.peerreviewyes
dc.source.beginpage187
dc.source.bookConductive Atomic Force Microscope
dc.source.endpage210
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/9783527699773.ch8/summary
imec.availabilityPublished - imec


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