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Detection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurements

dc.contributor.authorNorga, Gerd
dc.contributor.authorPlatero, M.
dc.contributor.authorBlack, K. A.
dc.contributor.authorReddy, A. J.
dc.contributor.authorMichel, J.
dc.contributor.authorKimerling, L. C.
dc.date.accessioned2021-10-01T08:34:08Z
dc.date.available2021-10-01T08:34:08Z
dc.date.issued1998
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2810
dc.sourceIIOimport
dc.titleDetection of metallic contaminants on silicon by surface sensitive minority carrier lifetime measurements
dc.typeJournal article
dc.source.peerreviewno
dc.source.beginpage2602
dc.source.endpage2607
dc.source.journalJ. Electrochem. Soc.
dc.source.issue7
dc.source.volume145
imec.availabilityPublished - imec


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