Effect of crystallisation on fatigue in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 layers
dc.contributor.author | Norga, Gerd | |
dc.contributor.author | Wouters, Dirk | |
dc.contributor.author | Bartic, Andrei | |
dc.contributor.author | Fè, Laura | |
dc.contributor.author | Maes, Herman | |
dc.date.accessioned | 2021-10-01T08:34:21Z | |
dc.date.available | 2021-10-01T08:34:21Z | |
dc.date.issued | 1998 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/2812 | |
dc.source | IIOimport | |
dc.title | Effect of crystallisation on fatigue in sol-gel PZT ferroelectric capacitors with reactively sputtered RuO2 layers | |
dc.type | Proceedings paper | |
dc.source.peerreview | no | |
dc.source.beginpage | 3 | |
dc.source.endpage | 6 | |
dc.source.conference | Applications of Ferroelectrics, 1998. ISAF 98. Proceedings of the 11th IEEE International Symposium | |
dc.source.conferencedate | 24/08/1998 | |
dc.source.conferencelocation | Montreux Switzerland | |
imec.availability | Published - imec |
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