dc.contributor.author | Debacker, Peter | |
dc.contributor.author | Han, Kwangsoo | |
dc.contributor.author | Kahng, Andrew B. | |
dc.contributor.author | Lee, Hyein | |
dc.contributor.author | Raghavan, Praveen | |
dc.contributor.author | Wang, Lutong | |
dc.date.accessioned | 2021-10-24T04:02:25Z | |
dc.date.available | 2021-10-24T04:02:25Z | |
dc.date.issued | 2017 | |
dc.identifier.issn | 0278-0070 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28184 | |
dc.source | IIOimport | |
dc.title | MILP-based optimization of 2-D block masks for timing-aware dummy segment removal in self-aligned multiple patterning layouts | |
dc.type | Journal article | |
dc.contributor.imecauthor | Debacker, Peter | |
dc.contributor.orcidimec | Debacker, Peter::0000-0003-3825-5554 | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | yes | |
dc.source.beginpage | 1075 | |
dc.source.endpage | 1088 | |
dc.source.journal | IEEE Transactions on Computer-Aided Design of Integrated Circuits and Systems | |
dc.source.issue | 7 | |
dc.source.volume | 36 | |
dc.identifier.url | http://ieeexplore.ieee.org/document/7883867/ | |
imec.availability | Published - open access | |