Low temperature deposition and characterization of high quality  nanocrystalline diamond films for the fabrication of highly sensitive pressure sensing membrane

dc.contributor.author	Drijkoningen, Sien
dc.date.accessioned	2021-10-24T04:27:28Z
dc.date.available	2021-10-24T04:27:28Z
dc.date.issued	2017-01
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/28279
dc.source	IIOimport
dc.title	Low temperature deposition and characterization of high quality nanocrystalline diamond films for the fabrication of highly sensitive pressure sensing membrane
dc.type	PHD thesis
dc.date.embargo	9999-12-31
dc.source.peerreview	no
dc.contributor.thesisadvisor	Haenen, Ken
dc.contributor.thesisadvisor	Nesladek, Milos
dc.contributor.thesisadvisor	Janssens, Stoffel
imec.availability	Published - open access