Fine Pitch 3D-Integration Using Self-Aligned Assembly
dc.contributor.author | Dubey, Vikas | |
dc.date.accessioned | 2021-10-24T04:28:37Z | |
dc.date.available | 2021-10-24T04:28:37Z | |
dc.date.issued | 2017-11 | |
dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28283 | |
dc.source | IIOimport | |
dc.title | Fine Pitch 3D-Integration Using Self-Aligned Assembly | |
dc.type | PHD thesis | |
dc.date.embargo | 9999-12-31 | |
dc.source.peerreview | no | |
dc.contributor.thesisadvisor | De Wolf, Ingrid | |
dc.contributor.thesisadvisor | Celis, Jean-Pierre | |
dc.identifier.url | https://limo.libis.be/primo-explore/fulldisplay?docid=LIRIAS1752737&context=L&vid=Lirias&search_scope=Lirias&tab=default_tab&lang=en_US&fromSitemap=1 | |
imec.availability | Published - open access |