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Thickness dependence of the resistivity of platinum-group metal thin films

dc.contributor.authorDutta, Shibesh
dc.contributor.authorSankaran, Kiroubanand
dc.contributor.authorMoors, Kristof
dc.contributor.authorPourtois, Geoffrey
dc.contributor.authorVan Elshocht, Sven
dc.contributor.authorBoemmels, Juergen
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorTokei, Zsolt
dc.contributor.authorAdelmann, Christoph
dc.date.accessioned2021-10-24T04:31:36Z
dc.date.available2021-10-24T04:31:36Z
dc.date.issued2017-07
dc.identifier.issn0021-8979
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28293
dc.sourceIIOimport
dc.titleThickness dependence of the resistivity of platinum-group metal thin films
dc.typeJournal article
dc.contributor.imecauthorSankaran, Kiroubanand
dc.contributor.imecauthorPourtois, Geoffrey
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.imecauthorBoemmels, Juergen
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorAdelmann, Christoph
dc.contributor.orcidimecSankaran, Kiroubanand::0000-0001-6988-7269
dc.contributor.orcidimecPourtois, Geoffrey::0000-0003-2597-8534
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.contributor.orcidimecAdelmann, Christoph::0000-0002-4831-3159
dc.source.peerreviewyes
dc.source.beginpage25107
dc.source.journalJournal of Applied Physics
dc.source.issue2
dc.source.volume122
dc.identifier.urlhttp://aip.scitation.org/doi/full/10.1063/1.4992089
imec.availabilityPublished - imec


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