Show simple item record

Use of high order precursors for manufacturing Gate all around devices

dc.contributor.authorHikavyy, Andriy
dc.contributor.authorZyulkov, Ivan
dc.contributor.authorMertens, Hans
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorLoo, Roger
dc.contributor.authorHoriguchi, Naoto
dc.date.accessioned2021-10-24T05:47:08Z
dc.date.available2021-10-24T05:47:08Z
dc.date.issued2017
dc.identifier.issn1369-8001
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28515
dc.sourceIIOimport
dc.titleUse of high order precursors for manufacturing Gate all around devices
dc.typeJournal article
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorZyulkov, Ivan
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage24
dc.source.endpage29
dc.source.journalMaterials Science in Semiconductor Processing
dc.source.volume70
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S136980011630484X
imec.availabilityPublished - open access


Files in this item

Thumbnail
Name:
33139.pdf
Size:
1.475Mb
Format:
PDF
View/open

This item appears in the following collection(s)

Show simple item record