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Plasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3

dc.contributor.authorHornsveld, Norah
dc.contributor.authorPut, Brecht
dc.contributor.authorKessels, Erwin
dc.contributor.authorVereecken, Philippe
dc.contributor.authorCreatore, Mariadriana
dc.date.accessioned2021-10-24T05:51:10Z
dc.date.available2021-10-24T05:51:10Z
dc.date.issued2017
dc.identifier.issn2046-2069
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28525
dc.sourceIIOimport
dc.titlePlasma-assisted and thermal atomic layer deposition of electrochemically active Li2CO3
dc.typeJournal article
dc.contributor.imecauthorPut, Brecht
dc.contributor.imecauthorVereecken, Philippe
dc.contributor.orcidimecVereecken, Philippe::0000-0003-4115-0075
dc.source.peerreviewyes
dc.source.beginpage41359
dc.source.endpage41368
dc.source.journalRSC Advances
dc.source.issue66
dc.source.volume7
dc.identifier.urlhttp://pubs.rsc.org/en/content/articlelanding/2017/ra/c7ra07722j#!divAbstract
imec.availabilityPublished - imec


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