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New technique localizes defects in 3D chips

dc.contributor.authorJacobs, Kristof J.P.
dc.contributor.authorParton, Els
dc.date.accessioned2021-10-24T06:12:03Z
dc.date.available2021-10-24T06:12:03Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28578
dc.sourceIIOimport
dc.titleNew technique localizes defects in 3D chips
dc.typeJournal article
dc.contributor.imecauthorJacobs, Kristof J.P.
dc.contributor.imecauthorParton, Els
dc.contributor.orcidimecJacobs, Kristof J.P.::0000-0002-1081-3633
dc.source.peerreviewno
dc.source.journalIMEC magazine
imec.availabilityPublished - imec


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