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Study of GHz-SAM sensitivity to delamination in BEOL layers

dc.contributor.authorKhaled, Ahmad
dc.contributor.authorKljucar, Luka
dc.contributor.authorBrand, Sebastian
dc.contributor.authorKögel, Michael
dc.contributor.authorAertgeerts, R.
dc.contributor.authorNicasy, R.
dc.contributor.authorDe Wolf, Ingrid
dc.date.accessioned2021-10-24T06:47:54Z
dc.date.available2021-10-24T06:47:54Z
dc.date.issued2017
dc.identifier.issn0026-2714
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28663
dc.sourceIIOimport
dc.titleStudy of GHz-SAM sensitivity to delamination in BEOL layers
dc.typeJournal article
dc.contributor.imecauthorKhaled, Ahmad
dc.contributor.imecauthorKljucar, Luka
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecKhaled, Ahmad::0000-0003-2892-3176
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage238
dc.source.endpage242
dc.source.journalMicroelectronics Reliability
dc.source.volume76-77
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0026271417302639
imec.availabilityPublished - imec
imec.internalnotesESREF 2017 paper


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