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Transistor strain measurement techniques and their applications

dc.contributor.authorKuhn, Markus
dc.contributor.authorCea, Stephen
dc.contributor.authorZhang, Jiong
dc.contributor.authorWormingtong, Matthew
dc.contributor.authorNuytten, Thomas
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.authorZuo, Jian-Min
dc.contributor.authorRouviere, Jean-Luc
dc.date.accessioned2021-10-24T07:11:13Z
dc.date.available2021-10-24T07:11:13Z
dc.date.issued2017
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28716
dc.sourceIIOimport
dc.titleTransistor strain measurement techniques and their applications
dc.typeBook chapter
dc.contributor.imecauthorNuytten, Thomas
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecNuytten, Thomas::0000-0002-5921-6928
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.source.peerreviewyes
dc.source.beginpage207
dc.source.bookMetrology and Diagnostic Techniques for Nanoelectronics
dc.source.endpage376
dc.identifier.urlhttps://www.crcpress.com/Metrology-and-Diagnostic-Techniques-for-Nanoelectronics/Ma-Seiler/p/book/9789814745086
imec.availabilityPublished - imec


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