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Microplasma device architectures with various diamond

dc.contributor.authorKunuka, Srinivasu
dc.contributor.authorKamatchi Jothiramalingam, Sankaran
dc.contributor.authorLeou, Keh-Chyang
dc.contributor.authorLin, I-Nan
dc.date.accessioned2021-10-24T07:16:08Z
dc.date.available2021-10-24T07:16:08Z
dc.date.issued2017
dc.identifier.issn2053-1591
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28727
dc.sourceIIOimport
dc.titleMicroplasma device architectures with various diamond
dc.typeJournal article
dc.date.embargo9999-12-31
dc.identifier.doi10.1088/2053-1591/4/2/025001
dc.source.peerreviewyes
dc.source.beginpage25001
dc.source.journalMaterials Research Express
dc.source.issue2
dc.source.volume4
dc.identifier.urlhttp://iopscience.iop.org/article/10.1088/2053-1591/4/2/025001/meta
imec.availabilityPublished - open access


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