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Mass discrimination in elastic recoil detection analysis and its application to Al2O3 on MoS2

dc.contributor.authorLaricchiuta, Grazia
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMeersschaut, Johan
dc.date.accessioned2021-10-24T07:28:48Z
dc.date.available2021-10-24T07:28:48Z
dc.date.issued2017
dc.identifier.issn0168-583X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28757
dc.sourceIIOimport
dc.titleMass discrimination in elastic recoil detection analysis and its application to Al2O3 on MoS2
dc.typeJournal article
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.source.peerreviewyes
dc.source.beginpage66
dc.source.endpage70
dc.source.journalNuclear Instruments and Methods in Physics Research B
dc.source.volume406
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S0168583X16305638
imec.availabilityPublished - imec


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