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Electromigration issues for advanced Al interconnects

dc.contributor.authorProost, Joris
dc.date.accessioned2021-10-01T08:43:29Z
dc.date.available2021-10-01T08:43:29Z
dc.date.issued1998-12
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/2880
dc.sourceIIOimport
dc.titleElectromigration issues for advanced Al interconnects
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorMaex, Karen
dc.contributor.thesisadvisorDelaey, L.
imec.availabilityPublished - imec


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