Show simple item record

Processing technologies for advanced Ge devices

dc.contributor.authorLoo, Roger
dc.contributor.authorHikavyy, Andriy
dc.contributor.authorWitters, Liesbeth
dc.contributor.authorSchulze, Andreas
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorCott, Daire
dc.contributor.authorMitard, Jerome
dc.contributor.authorPorret, Clément
dc.contributor.authorMertens, Hans
dc.contributor.authorRyan, Paul
dc.contributor.authorWall, John
dc.contributor.authorMatney, Kevin
dc.contributor.authorWormington, Matthew
dc.contributor.authorFavia, Paola
dc.contributor.authorRichard, Olivier
dc.contributor.authorThean, Aaron
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorCollaert, Nadine
dc.date.accessioned2021-10-24T08:14:18Z
dc.date.available2021-10-24T08:14:18Z
dc.date.issued2017
dc.identifier.issn2162-8769
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28854
dc.sourceIIOimport
dc.titleProcessing technologies for advanced Ge devices
dc.typeJournal article
dc.contributor.imecauthorLoo, Roger
dc.contributor.imecauthorHikavyy, Andriy
dc.contributor.imecauthorWitters, Liesbeth
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorCott, Daire
dc.contributor.imecauthorMitard, Jerome
dc.contributor.imecauthorPorret, Clément
dc.contributor.imecauthorMertens, Hans
dc.contributor.imecauthorFavia, Paola
dc.contributor.imecauthorRichard, Olivier
dc.contributor.imecauthorThean, Aaron
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorCollaert, Nadine
dc.contributor.orcidimecLoo, Roger::0000-0003-3513-6058
dc.contributor.orcidimecHikavyy, Andriy::0000-0002-8201-075X
dc.contributor.orcidimecMitard, Jerome::0000-0002-7422-079X
dc.contributor.orcidimecPorret, Clément::0000-0002-4561-348X
dc.contributor.orcidimecFavia, Paola::0000-0002-1019-3497
dc.contributor.orcidimecRichard, Olivier::0000-0002-3994-8021
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecCollaert, Nadine::0000-0002-8062-3165
dc.identifier.doi10.1149/2.0301612jss
dc.source.peerreviewyes
dc.source.beginpage14
dc.source.endpage20
dc.source.journalECS Journal of Solid State Science and Technology
dc.source.issue1
dc.source.volume6
dc.identifier.urlhttp://jss.ecsdl.org/content/6/1/P14.abstract
imec.availabilityPublished - imec


Files in this item

FilesSizeFormatView

There are no files associated with this item.

This item appears in the following collection(s)

Show simple item record