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Photonic Biosensors in Silicon Nitride with an On-Chip Spectral Filter Read Out by a Broadband Light Source

dc.contributor.authorMartens, Daan
dc.date.accessioned2021-10-24T08:50:20Z
dc.date.available2021-10-24T08:50:20Z
dc.date.issued2017-06
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28927
dc.sourceIIOimport
dc.titlePhotonic Biosensors in Silicon Nitride with an On-Chip Spectral Filter Read Out by a Broadband Light Source
dc.typePHD thesis
dc.source.peerreviewno
dc.contributor.thesisadvisorBienstman, Peter
imec.availabilityPublished - imec


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