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Optimized Si3N4 grating couplers for relaxed alignment requirements under flood illumination

dc.contributor.authorMartens, Daan
dc.contributor.authorDong, Genghua
dc.contributor.authorBienstman, Peter
dc.date.accessioned2021-10-24T08:51:16Z
dc.date.available2021-10-24T08:51:16Z
dc.date.issued2017-02
dc.identifier.issn1559-128X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/28929
dc.sourceIIOimport
dc.titleOptimized Si3N4 grating couplers for relaxed alignment requirements under flood illumination
dc.typeJournal article
dc.contributor.imecauthorBienstman, Peter
dc.contributor.orcidimecBienstman, Peter::0000-0001-6259-464X
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage1286
dc.source.endpage1290
dc.source.journalApplied Optics
dc.source.issue5
dc.source.volume56
dc.identifier.urlhttps://www.osapublishing.org/ao/abstract.cfm?uri=ao-56-5-1286
imec.availabilityPublished - open access


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