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Pore surface grafting of porous low-k dielectrics by selective polymers

dc.contributor.authorRezvanov, Askar
dc.contributor.authorZhang, Liping
dc.contributor.authorWatanabe, Mitsuhiro
dc.contributor.authorHacker, Nigel
dc.contributor.authorKolomeisky, Anatoly
dc.contributor.authorArmini, Silvia
dc.contributor.authorde Marneffe, Jean-Francois
dc.date.accessioned2021-10-24T12:11:06Z
dc.date.available2021-10-24T12:11:06Z
dc.date.issued2017
dc.identifier.issn1071-1023
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29299
dc.sourceIIOimport
dc.titlePore surface grafting of porous low-k dielectrics by selective polymers
dc.typeJournal article
dc.contributor.imecauthorZhang, Liping
dc.contributor.imecauthorArmini, Silvia
dc.contributor.imecauthorde Marneffe, Jean-Francois
dc.contributor.orcidimecArmini, Silvia::0000-0003-0578-3422
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage21211
dc.source.journalJournal of Vacuum Science and Technology B
dc.source.issue2
dc.source.volume25
dc.identifier.urlhttp://avs.scitation.org/doi/full/10.1116/1.4978046
imec.availabilityPublished - open access


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