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CMOS fabricated large array of free standing substrate-less photonic crystal cavities for biosensing applications

dc.contributor.authorSaurav, Kumar
dc.contributor.authorKumari, Sulakshna
dc.contributor.authorLe Thomas, Nicolas
dc.date.accessioned2021-10-24T12:56:41Z
dc.date.available2021-10-24T12:56:41Z
dc.date.issued2017
dc.identifier.issn1943-0655
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29378
dc.sourceIIOimport
dc.titleCMOS fabricated large array of free standing substrate-less photonic crystal cavities for biosensing applications
dc.typeJournal article
dc.contributor.imecauthorKumari, Sulakshna
dc.contributor.imecauthorLe Thomas, Nicolas
dc.date.embargo9999-12-31
dc.source.peerreviewyes
dc.source.beginpage2400308
dc.source.journalIEEE Photonics Journal
dc.source.issue2
dc.source.volume9
dc.identifier.urlhttp://ieeexplore.ieee.org/document/7885076/
imec.availabilityPublished - open access


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