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Ternary silicide formation from Ni-Pt, Ni-Pd and Pt-Pd alloys on Si(100): Nucleation and solid solubility of the monosilicides

dc.contributor.authorSchrauwen, A.
dc.contributor.authorDemeulemeester, J.
dc.contributor.authorDeduytsche, D.
dc.contributor.authorDevulder, Wouter
dc.contributor.authorDetavernier, C.
dc.contributor.authorComrie, C.M.
dc.contributor.authorTemst, Kristiaan
dc.contributor.authorVantomme, Andre
dc.date.accessioned2021-10-24T13:06:29Z
dc.date.available2021-10-24T13:06:29Z
dc.date.issued2017
dc.identifier.issn1359-6454
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/29394
dc.sourceIIOimport
dc.titleTernary silicide formation from Ni-Pt, Ni-Pd and Pt-Pd alloys on Si(100): Nucleation and solid solubility of the monosilicides
dc.typeJournal article
dc.contributor.imecauthorDevulder, Wouter
dc.contributor.imecauthorTemst, Kristiaan
dc.contributor.imecauthorVantomme, Andre
dc.contributor.orcidimecDevulder, Wouter::0000-0002-5156-0177
dc.source.peerreviewyes
dc.source.beginpage19
dc.source.endpage27
dc.source.journalActa Materialia
dc.source.volume130
dc.identifier.urlhttp://www.sciencedirect.com/science/article/pii/S1359645417302136?via%3Dihub
imec.availabilityPublished - imec


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